Hitachi High-Tech is a part of Hitachi Ltd and has been developing and manufacturing electron microscopes since 1947. Some of the historical milestones have been
- 1972 First commercial FESEM, HFS2
- 1981 Commercial breakthrough in FESEM with S-800
- 1984 First CD-SEM (Automated Critical Dimension-SEM)
- 1986 First true in-lens FESEM, S-900
- 1992 First immersion lens FESEM with inlens detectors, S-4500
- 2006 Commercial break through for tabletop SEM, TM-1000

Currently the portfolio contains many electron microscopy products and accessories.