Hitachi Ultra High Resolution Cold FE-SEM
Key Technical Specifications
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Resolution: 1.0 nm at 15 kV and 1.4 nm at 1 kV.
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Magnification: Range from 20x or 30x up to 800,000x.
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Voltage: Variable acceleration voltage from 0.5 kV to 30 kV.
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Stage: Motorized 5-axis stage handling samples up to 100 mm or 4-inch wafers.
- Detectors: Typically equipped with Secondary Electron (SE), Backscattered Electron (BSE), and Energy Dispersive X-ray (EDS) detectors.
