CS5000 CD-SEM

A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs

The Advanced CD Measurement SEM CS5000 provides high-quality SEM imaging, improved measurement precision, and fast, automated operation, designed to improve productivity and operating efficiency of existing manufacturing lines and increase customer's process control capability. In addition, the CD-SEM: CS5000 can be configured to handle three different wafer sizes that can be switched by the customer using to a new wafer-transfer system^*. Various wafer materials such as Silicon Carbide (SiC), Gallium Nitride (GaN), and glass to meet diversified customer's needs for new semiconductor or electronic devices are supported.