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The Evactron® E50 Plasma De-Contaminator is the most powerful model in the Evactron E-Series family of products. E50 plasma cleaner with external hollow cathode RF (XHCRF) plasma radical source (PRS) combines high performance cleaning with simplified design and simple operation.
The E50 system was designed to be user installed for removal of hydrocarbon contamination from high vacuum chambers such as SEMs, FIBs and large volume chambers. The Evactron E50 Plasma De-Contaminator fits most models of SEM and FIB systems with turbo pump evacuation systems. In operation it provides The Fastest Way to Pristine for SEM or FIB instruments.