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DI2800 uses scattering-intensity simulation technology to optimize the illumination and detection optics, enabling highly sensitive inspection of patterned-wafer defects developed during the manufacturing process. It has a detection sensitivity of 0.1-μm standard particle size on mirrored wafers. This makes it possible to examine even the incredibly small, 0.3-mm square size chips used in semiconductor devices in the IoT and automotive fields, with optimization of the inspection sequence enabling a defect inspection speed of over forty 200-mm wafer sheets per hour.
(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x
(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x
(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x
(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x
