Advances in SEM-based nanoprobing - Electrical Fault Localization and Failure Analysis
Mats Eriksson
Thursday April 10th 10.00 CET
Learn how to perform electrical characterization on small structures using a high accuracy probing solution. Understand the various probing techniques like EBIC, RCI, EBAC, EBIRCH, and EBIV where we use the electron beam to generate a signal inside a sample and the signal is then amplified for imaging purposes. This is also a powerful technique to understand properties of semiconducting nanowires or photovoltaics.