LiteScope AFM-in-SEM

Unique Atomic Force Microscope LiteScope is designed to merge the strengths of AFM and SEM techniques, resulting in effective workflow and extending the possibilities of correlative microscopy and in-situ analysis that ware difficult or almost impossible by conventional instrumentation.

AFM brings new in-situ SEM methods of characterization, enabling the analysis of a broad range of properties:

Material mechanical properties

• topography
• local elastic properties (tapping & contact mode)
• local sample hardness (non-topographic)
• depth-dependent material characterization
• various in-situ operations

Material magnetic properties

• magnetic domain imaging

Material electro-mechanical properties

• piezoelectric domain imaging

Material electrical properties

• conductivity map (including insulated areas)
• local surface potential
• local electrical properties (non-topographic)
• sub-nanometer topography